Identification of MEMS Geometric Uncertainties through Homogenization

Fabrication imperfections strongly influence the functioning of Micro-Electro-Mechanical Systems (MEMS) if not taken into account during design process. They must be indeed identified or precisely predicted to guarantee a proper compensation calibration phase directly in operation. In this work, we propose an efficient approach for identification geometric uncertainties MEMS, exploiting asymptotic homogenization technique. particular, proposed strategy is experimentally validated on MEMS filter, device constituted by complex periodic geometry, which would require high computational costs simulated through full-order models. The structure replaced equivalent homogeneous medium, allowing fast optimization procedure identify comparing simplified analytical model with experimental data available filter. actual over-etch, obtained after release phase, and electrode offset fabricated filter are effectively strategy.